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Specifications
1) Mass flow meter mixing gas system for CVD system2) CE and ISO9001 certificate.
3)1 years warranty
Mass flow meter mixing gas system for CVD system
HQ-Z mixed gas system is controlled by the single-channel or multi-channel mass flowmeter to continuous supply the mixed gas.
And can realize precision measurement and control of the gas mass flow;
Each gas pipes are equipped with high-pressure check valve to ensure the system used safety and reliable;
With the features of uniform mixed gas, high precision control, digital display and intuitive and sensitive features.
The high-precision mass flow control system is composed of multi-channel mass flow meter, flow indicator, etc. ,
Achieved the precision measurement and control of gas flow; with high accuracy, fast response, extremely low zero drift and temperature drift, good compatibility and reliable sealing performance features.
Via software to support the interactive interface and easy operation.
Each gas pipeline are equipped with high - pressure check valve to ensure the system safe and reliable;
For the precision gas flow control of high temperature atmosphere sintering, atmosphere restoring and CVD/CVI experiments.
Model |
HQ-Z (Approved by CE certificate, ensure the safety operation of the machine. Certificate No.: GB/1067/4189/12 Issue 1) |
Control mode |
D07 - 7K mass flowmeter, of D08 flow indicator |
Flow |
0-500SCCM/0-1SLM (Customized) |
Linear |
±0.5%F.S. |
Accuracy |
±1%F.S. |
Repeat accuracy |
±1%F.S. |
Respond time |
≤2sec |
Zero drift |
<0.6%F.S. |
Pressure |
3MPa |
Gas channel |
Multi-routes (Customized) |
Mix gas tank |
Φ100*300mm |
Check valve |
Φ6mm |
Needle valve |
Stainless steel |
Pipeline |
Φ6mm Stainless steel tube |
Interface |
SwagelokΦ6mm |
Moving workbench |
720*500*850mm |
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