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SCAIR 10HP 1.2MPa Ultra-Clean Compressor for Wafer Handling Robots & AMC Control

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Product Spotlights

0.9 m³/min F.A.D at 1.2MPa. SEMI F72-compliant solution achieving
Negotiable MOQ: 1 Unit (Price negotiable depending on order volume and customization)
Key Specifications
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Material:
Carbon Steel
Warranty:
one year
Drive Mode:
Electric
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Dongguan Shun Chi Mechanical And Electrical Equipment Co. , Ltd.
Gold Verified Supplier
4Yrs
Verified Business License
Payment & Shipping
Payment Methods:
Port of Shipment:
Dongguan
Delivery Detail:
7 days

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  • Product Details

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Material Carbon Steel
Warranty one year
Drive Mode Electric
Lubrication Style Oil-less
Power Source AC Power
After-sales Service Maintenance
Performance Low Noise, Variable Frequency, Explosion-Proof
Principle Rotary Compressor
Mute Mute
Configuration Stationary
Transport Package wooden frame
Specification 10-100HP
Trademark SCAIR
Origin China

英文版 10匹空压机（3）英文版 10匹空压机（2）英文版 10匹空压机 参数

SCAIR 10HP 1.2MPa Ultra-Clean Compressor: Nanoscale Air for Defect-Free Wafer Transfer

SCAIR’s 10HP compressor delivers 0.9 m³/min at 1.2MPa with SEMI F72 certification, preventing $2.4k/hour tool downtime where airborne molecular contamination (AMC) causes stochastic defects in 3nm node production.


AMC-Free Air Engineering for Advanced Node Semiconductor Manufacturing

Featuring radical-assisted purification and mu-metal EMI shielding, this 7.5kW system achieves


Wafer Fab Performance Specifications

  • Gas Delivery: 0.9 m³/min @ 1.2MPa (0.7m³/min @ 1.5MPa for loadlocks)

  • Vibration Control: 0.1μm/s per ISO 10816-3 Class A

  • AMC Certification:

  • Particle Count: ISO Class 0 per ISO 8573-1:2010


Contamination Control Technologies

  • Molecular Scavenging: Photocatalytic oxidation destroys AMC at 0.01ppt detection limits

  • EMI Immunity: Mu-metal enclosure prevents >30dB magnetic interference

  • Pulse-Free Robotics: Dual dampeners eliminate 0.15MPa ripple causing robot jitter

  • Cryogenic Compatibility: Maintains flow at -60°C for cryo-process interfaces


Cleanroom Automation Applications

  • EFEM Robotics: Powers wafer handlers achieving ±0.3nm placement repeatability

  • Reticle Storage: Supplies ISO Class 1 air for pellicle protection in

  • Ion Implantation: Feeds pneumatic wafer clamps with

  • Metrology Stages: Drives precision positioning systems maintaining 0.5nm measurement stability


SEMI Compliance Protocol

  • Certifications: SEMI S2/S8, SEMI F72 (AMC control), IEC 62443-3-3 cybersecurity

  • Material Safety: UL 94 V-0 flammability rating

  • Validation: NIST-traceable calibration per SEMI E89


Yield Management Q&A

  • Q: How to prevent amine-induced EUV oxidation?

    A: 95% over 10,000 exposure cycles.

  • Q: Solution for robot positioning errors during voltage sags?

    A: SEMI F47 voltage tolerance maintains operation during 20% voltage dips.

  • Q: Compliance documentation for ISO 14644 requalification?

    A: Integrated particle counters generate ISO 14644-2 reports with blockchain verification.



Product Tags: 10hp semiconductor compressor , wafer handling air , EFEM robotics

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Dongguan Shun Chi Mechanical And Electrical Equipment Co. , Ltd.
Gold Verified Supplier
4Yrs
Verified Business License
Business Type
Trading Company
Year Established
2000
Annual Export Value
US$50 Million - US$100 Million
Port of Shipment
guangzhou, shenzhen, dongguan
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