Advanced Energy LAM 810 RF Power Supply (P/N 068158-015) – Stable 13.56 MHz Power for Lam 810 Platforms

• Warranty: 365 days coverage

• Lead time: In-stock ships in 1 week; no more than 1 month at the latest

• Payment: 50% advance payment; full payment prior to delivery

• Express options: FedEx, UPS, DHL

• Pre‑shipment test: Functional verification and basic burn‑in, with photos/records on request

• 13.56 MHz RF output – The standard frequency for plasma etch and clean, ensuring recipe compatibility on LAM 810 tools.

• Stable power delivery – Designed for tight power regulation and good arc handling, which typically reduces process drift and wafer-to-wafer variability.

• Lam 810 integration – Rackmount footprint and I/O pinout aligned for Lam 810 system cabinets, easing field replacement.

• Analog control with service port – 0–10 V setpoint/monitoring and interlocks, plus RS‑232 for basic diagnostics in most configurations.

• Robust thermal design – Forced‑air cooling and protection logic to maintain uptime in demanding fab environments.

• Field-proven spare – Many customers keep one on the shelf to cut MTTR; one maintenance lead told us it’s a “30‑minute swap, including checks.”

Typically deployed on Lam Research 810 platforms in:

• Plasma etch processes (oxide, nitride, poly) requiring stable 13.56 MHz delivery

• Chamber cleans and seasoning steps where repeatable RF ramp/hold is critical

• Legacy tool sustainment programs keeping mature nodes in high‑volume production

• Drop‑in compatibility – Minimizes recipe changes and requalification risk on Lam 810 lines.

• Predictable performance – Good regulation helps maintain CD and etch‑rate stability, in many cases reducing scrap and rework.

• Spares strategy friendly – Keep one on the shelf; swap times are short, so uptime stays high.

• Lifecycle support – We can coordinate repair, calibration reports, and connector kits if needed for your cabinet revision.

• Total cost control – Refurb or exchange programs available in some cases, which seems to be the best balance of cost and risk for legacy tools.

• Environment: Install in a 19" grounded cabinet with clear intake/exhaust; allow at least 75 mm clearance for airflow.

• Wiring: Use the specified gauge for AC input; verify earth bond; route RF coax separately from control cabling to reduce noise.

• RF path: Inspect connectors, O‑rings, and the matching network; confirm 50 Ω path and proper shield integrity.

• Safety: Lockout/tagout before servicing; discharge capacitors; verify interlocks prior to enabling RF.

• Routine care: Quarterly dust removal on fans/filters; annual functional check and calibration; firmware/config checks during PM (where applicable).

• Typically compliant with CE and RoHS; produced under ISO 9001 quality systems

• 365‑day warranty; serial‑number traceability and test report available on request

If you can share your cabinet revision and current RF/match configuration, we’ll confirm pinout, mounting height (U), and any harness differences to make the install smooth on first pass.