Wafer specification:
2-8 inches, single or double cassette type
Main materials:
Metal frame + PP/PVC shell, channel body material PP/PVDF/PTFE / quartz.
Process tank function:
Circulating filtration + Heating and cooling + Wafer rolling
Basic process flow:
Developing tank → QDR developing tank → QDR
Equipment type:
Manual/Semi-automatic/Automatic (customized)
Footprint: 1500 (W) x 1100 (D) x 2100 (H) mm (customized)
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