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Thin-film Humidity Sensing Element SH
• Low cost
• Wide T/RH operating zone
• Operating temperature up to 200°C
• Excellent sensibility
• Very good dynamic properties
• Short response time
• Long-term stability
The SH relative humidity sensing element consists of a system of electrodes on a glass-ceramic substrate, covered by a humidity-sensitive polymer coating and a water-vapor permeable metallic membrane. This coating system represents a humidity-dependent capacitor. Utilizing the principal of capacitive measurement, SH measures relative humidity in air or other non-aggressive gases and gas mixtures with good long-term stability and linearity, small hysteresis, and excellent dynamic response.
SH Thin-film Humidity Sensing Element Technical specifications
| Variant | 1 | 2 | 3 |
| Measurement range | 0 - 100 %RH | ||
| Operating temperature | -60~200°C; with protective cap (option): -40~120 °C | ||
| Temperature dependence | RH' = [RH + a*(T-25)]*(b0 +b1 *T+b2 *T2), where: a = 0.04 for T ≥ 25°C, 0 for T<25°C; b0 = 0.98; b1 = 6x10-4; b2 = 6x10-6 | ||
| Permissible voltage | max. 3 VAC (no DC voltage allowed!) | ||
| Nominal capacitance | 115 ± 15 pF at 20°C | 135 ± 10 pF at 20°C | 1050 ± 50 pF at 20°C |
| Sensitivity | 0.25 pF / %RH | 0.35 pF / %RH | 2.5 pF / %RH |
| Non-linearity | < 1.5% at 5 - 95 %RH | <1.5% at 5 - 95 %RH | <1.5% at 5 - 95 %RH |
| Hysteresis | <1.5 %RH at 5 - 95 %RH | <1.5 %RH at 5 - 95 %RH | <1.5 %RH at 5 - 95 %RH |
| Long-term stability | <1 %RH per year | <1 %RH per year | <1.5 %RH per year |
| Response time | <10 s | <10 s | <10 s |
| Loss factor | <0.03 at 10 kHz | <0.03 at 10 kHz | < 0.03 at 10 kHz |
| Operating frequency | 30 - 300 kHz | 30 - 300 kHz | 30 - 300 kHz |
| Application | climate control, handheld meters, humidifiers, dehumidifiers, HVAC and industrial applications, high-temperature applications | ||
SH Thin-film Humidity Sensing Element Ordering code SH* - #1
| Code | Feature or option | Code values |
| * | Variant | 1, 2, 3 |
| #1 | Protective cap | X - none, P - plastic protective cap |
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