PDC-32G Compact Desktop Plasma Cleaner

Model:

EQ-PDC-32G Compact Desktop Plasma Cleaner (with vacuum pump)

Brief

Introduction:

EQ-PDC-32Compact Desktop Plasma Cleaner Gis a micro desktop plasma cleaner, this machine can use air, oxygen, Ar to clean the nano organic pollutants on the surface of glass, semiconductor, high polymer material, metal substrate. In the condition of the high(RF)power, the max organic cleaning rate is about 10nm/min. Before you coat the material, use the machine to clean the single crystal substratefor reaching the better effect.

Main Feature:

Small and beautiful shape

Adjustable RF power: (high, medium, low)

Safe operation, low cost, environmental

Technical

Parameter:

Input voltage:115V AC ,50/60 Hz;or230V AC, 50/60 Hz, 200W

Output frequency:13.56 MHz

Plasma jet frequency:output power is adjustable at three levels:

      low    680V DC 10mA DC       6.8W

      medium    700V DC 15mA DC      10.5W

      high    720V DC 25mA DC       18 W

Plasma chamber body:76mm(Dia.)x 165mm(Length) Pyrex glass chamber body,Detachable front cover

Vacuum pump and control valve:dipolar sliding vane rotary vacuum pump(110V, 226 L/m) with filter and KF-D25 Lock gate----equip with KFD25 connecter , 600mmstainless steel tube and high quality filter.

Max. ultimate pressure is 30 m Torr less

1/8" NPT needle valve effective control the gas flow and the pressure in the chamber.

1/8" NPT threeway valve is in order to spread the gas and to exchange the chamber isolating and air leakage conditions.

Inert gas:According to the required washing pollutant, we can select to use N2, Ar, Airand mixed gas.

Note: can't use flammable gas

Warranty:One year  (without Pyrex glass chamber body)

Specification:

Size:216mm(H) x 254mm(W) x 203mm(D)

Net weight:6.5 kg (Without vacuum pump)14.0 kg(With vacuum pump)

Optional

Accessories :

If use the 2" crystal quartz boat, this cleaner can treat 25 of dia.2"crystal one time;

Digital vacuum gauge,used for precision regulating and controlling the pressure in the chamber.