1kW/2450MHz Microwave Plasma System

1kW/2450MHz Microwave Plasma System photo-1
Negotiable MOQ: 1 Set (Price negotiable depending on order volume and customization)
Key Specifications
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Place of Origin:
Sichuan, China
Brand Name:
Guoguang
Model Number:
GMPS-2010K
Payment & Shipping
Payment Methods:
Port of Shipment:
Chengdu
Delivery Detail:
Delivery time depends on order quantity.
Place of Origin Sichuan, China
Brand Name Guoguang
Model Number GMPS-2010K

Specifications

GMPS-2010K RectangularCavity Microwave Plasma System, microwave plasma cvd

GMPS-2010K Rectangular Cavity Microwave Plasma System

 

Features: 

   1.0kW/2450MHz microwave power source    with programmable control system    provides adjustable output power from 0.1  to 1.0kW with low ripple and precisely regulation.

    Circulator, tuner, sampling dummy load   and waveguides consist of transmission    system, which insure isolation between magnetron and reflecting wave, and regulate best matching.

    The special designed wave guide with slots coupled large area microwave rectangular cavity as the reacting applicator, which have five window ports for place sample (φ150mm), viewer (φ150mm), vacuum ( CF-35 ), temperature sensor ( CF-35 ) and plasma diagnosis ( CF-35 ).

    It has very promise to excite an intense spatially stable plasma where the substrates be placed and realize a large area substrates films MPCVD with stable operation.

    Built in high vacuum system and two fine MFC systems.

    With Sample supporter moveable and temperature auto control

    Application: MPCVD research and middle-mass production for diamond or various kinds of films.

 

Specification

Frequency

2450±50MHz

Power Output

0.3-1kW Continue Adjustable

Power Stability

< ±2% ( at specific Power level )

Wave guide

WR-340 with FD-340 Flange

Control Interface

RS-232 Program Controllable

Power Supply

380V±10%  3 Phase 4 Line

Cooling Water

> 3 L / min

System VSWR

≤ 1.2

Leakage

< 5mW/cm2 ( IEC Standard )

Window Dimension

440(L)×200(W)×15(H) mm

Cavity Dimension

440(L)×200(W)×200(H) mm

Vacuum System

P < 1×10-1 Pa.

Gas MFC System

2 MFC ( Mass Flow Control )

Size

1800(L) x 800(W) x 1500(H)mm

Weight

500kg

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Business Type
Manufacturer, Trading Company
Year Established
1981
Factory Size
Above 100,000 square meters
Total Employees
Above 1000 People

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