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Specifications
1.thin film2.high brightness
3.ISO9001
Specification and model |
LD-1200(A/B) |
Vacuum Chamber Inner Size |
¢1300×h1500(mm) |
Effective coating space |
¢1100×h1300(mm) |
Workpiece rotary frame |
Rotation +revolution and rotation |
The layout of the rotary frame |
The top of Vacuum Chamber downward install |
Quantity of the hanging rod |
4 revolution +12 revolution and rotation |
Rotary speed |
0-5revolutions/minute(rotation) speed governor adjust |
Quantity of the workpiece coated each time |
1 inch workpieces:1400-1680 pcs each time 10 inches workpieces:160-192 pcs each time |
Workpiece material |
Metal ,glass, ceramics etc. |
Film material |
Cr, Cu, Ni TiN, ZrN, TiCN, etc. |
Film color |
gold, silver, copper, gold rose and iridescence etc. |
Requirement of production space |
8×8m |
Requirement of capacitance |
50Hz 380V 80KVA |
Requirement of cooling water |
3ton/hour circulating cooling water/ 25°C |
Pollutant emission |
none |
Work noise |
≤90decibel |
Vacuum air pump |
2X-70rough pump+2X-30maintain pump |
Roots pump |
ZJP-300 |
Diffusion pump |
KT-600 |
Ultimate vacuum |
Overmatch 6×10-4 Pa |
Work vacuum |
6.67×10-3 Pa |
Exhaust speed |
<20minutes(atmosphere—work vacuum) |
Pressure rising rate(leak rate) |
≤0.35Pa/h |
Vacuum chamber material |
304 stainless steel |
Rotary frame material |
Carbon steel plating |
Cathode voltaic arc ion source |
12 dynamoelectric striking arc indirect cooling |
Target size |
¢100×40(mm) |
Grid bias power supply |
35KW 20KHz Inverter power supply |
Voltaic arc power supply |
12 0-200A electric current tunable |
Vacuum chamber heating power |
18KW temperature PID adjust |
Control model |
Automatic(A) Manually operation(B) |
Automatic control system (A) |
Industry control computer+ PLC+ LCD+ printer |
Coating cycle |
a hour per coating |
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