EMI Film Special Coating Machine
EMI film special coating machine
EMI film
Kinds of dielectric film:
Antireflection film, Reflection film, Filter film, Beam-splitting film, Multicolored film
Protective film:
Rigid hydrophobic membrane,DLC
Application:
Car mirror, Optical lens, Spectacle,EMI film, Cold light lamp,
Decorative Lighting, Rhinestone.
Product Characteristic:
1.Equipment with rectangular arc sources and anode layer ion source
2.Three-channel feedback control system :arc source, gas path,Deposition process
3.Octahedral Chamber:
A. Promotion of space utilization and reliability for using
B. Designed flexibly to obtain the best deposition effect
C. Convenient maintenance and also easy to be repaired
Product characteristic:
1.Accurate optic film deposition controller: crystal thickness monitor/optical monitor
2.Center-driving or planetary substrate dome is selectable
3.Uniformed and large area ion beam distribution Hall-ion source
4.E-beam gun, stable power output, small and uniform E-beam spot
5.Well uniformity of film thickness, well repeatability of deposition
3.Technical Parameters:
| Model and Technical Parameters of VAKIA-OEC Series Vacuum Optical (Electron Gun) Coating Machine | |||
| Performance/Model | VAKIA-OEC-900 | VAKIA-OEC-1200 | VAKIA-OEC-1350 |
| Size of coating chamber | Ø900*H1050mm | Ø1200*H1250mm | Ø1350*H1450mm |
| Frock clamp | Arch single workpiece disc, maximally meeting customers’ requirement on evenness, rotation: 5-30 r/min, stepless variable speed | 1. Arch single workpiece disc, maximally meeting customers’ requirement on evenness, rotation: 530r/min, stepless variable speed 2. Arch three-workpiece disc, planetary revolution and autorotation, meeting customers’ requirement on production amount, rotation: 5-30r/min, stepless variable speed | |
| Vacuum system | Diffusion pump KT-600 (Canon), Roots pump ZJ-300, mechanical pump 2X-70, holding pump 2X-8, 304 stainless steel piping | Diffusion pump KT-800 (Canon), Roots pump ZJ-600, mechanical pump 2X-70, holding pump 2X-8, 304 stainless steel piping | Diffusion pump KT-800 (Canon), Roots pump ZJ-600, mechanical pump 2X-70, holding pump 2X-25, 304 stainless steel piping |
| Limit vacuum: Superior to 6*10-4PA | |||
| Equipped with anti-turbulence device, safe interlock design, optional manual or automatic | |||
| Heating system | Heating mode of heating tube, PID control, maximum: 350°C±1.5°C | ||
| Working gas gassing | Gas mass controller or manual fine tuning gas filling valve | ||
| Vacuum ion bombardment | DC 3KV, 0.6KW rod cathode (for automatically cleaning workpieces before coating) and optional gas ion source | ||
| Evaporation source (optional) | 1. Electron gun: 6KW, high voltage 4KV-10KV, adjustable. Positioning scanning, triangular wave scanning, circular scanning, spiral scanning, square wave scanning, sine wave, good beam spot focusing, high positioning precision and good scan reproducibility | ||
| 2. Crucible: Six-hole Φ38*20 crucible or four-hole Φ38*20 plus arc crucible with hole center arc length of 87 (for evaporation materials with large consumption and low melting point) or hole Φ48*18 crucible | |||
| Ion source (optional) | 1.5KVA Hall ion source is used for cleaning before electroplating or assisted plating in electroplating process, and favorable for improvement of film refractive index, firmness, compactness and adhesion. | ||
| Coating control system (optional) | 1. Crystal controller: Store 1-99 layer automatic coating process, 99 types of program data, precision: 0.5$+1A fixed error. | ||
| 2. Light controller adopts multi-wavelength full spectrum end point analysis technology, determines film by analyzing monitoring chip 370-870mm refractive index (or reflective rate) curve, has high control precision and can also adopt single wavelength control, automatic control and manual control. The additional MACILEOD film calculation software has high integration degree. | |||
| 3. Light controller matches the crystal controller to meet coating requirements of high precision and high repeatability, and upper computer to realize automatic control. | |||
| 4. Domestic light controller: Wavelength 330-870, adjustable, precision: ±1.5NM. | |||
4.Samples:

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