Electron Beam Evaporation Optical Coating Machine
Electron beam evaporation optical coating machine
Equipment introduction
Electron beam evaporation optical coating machine can coat single or multi-layers on viewing window or spectrum element that applied to optical instruments optical lens.
Touching screen + PLC and MDC-360C make up the fully automatic controlling system that can realize parameter input, process monitoring and data saving, technological process setting and auto-operating. It helps improve the quality of film layers.
Machine Features:
1) Capable of equipping ion source or plasma gun for depositing multi-layer and precise optical coatings.
2) When equipped substrate reverses mechanism, it would greatly reduce the processing time, get higher throughput, and lower production cost per unit.
3) With its high-performance layer monitoring system and computerized system, it can fulfill precise thickness requirement for optical layer coating.
4) Process control system runs on windows system interface and easy to use.
5) Repeatable and reliable coating.
Electron beam evaporation optical coating machine Application :
It is suitable for coating anti-reflection coating, optical filter, multicolor, red, yellow, green and blue on optics lens, electronics, acrylic, glass, lamps, mobile viewing window, glasses, lighting.
optical coating machine samples:
Main technology parameter:
Model |
OEC-630 |
OEC-1350 |
OEC-1500 |
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Chamber size |
Φ630 |
1350 |
1500 |
|
800 |
1500 |
1700 |
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fixture |
Arch-shaped 3 pieces of sector or single arch-shaped part |
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Pumping time |
From atmosphere to 5.0x10-3Pa<15min (unloaded) |
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Ultimate vacuum |
≤5x10-4Pa |
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Evaporation source |
2 groups resistance evaporation, single power source |
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E-beam, high pressure, adjustable | ||||
Ion source |
Kerr source, double filament, power: 2KW |
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Film thickness controller |
MDC-360C crystal film thickness controller or SQC-310, 9704 optical film thickness controller |
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Controlling system |
Crystal touching screen and PLC make up the fully automatic controlling system, ( Automatic/ Manual) |
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Thickness Method |
Crystal Monitor/ Admittance Monitor |
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Baking system |
350, PID thermostatic control,9KW |
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Used for |
Optical lens, glass products, ornaments, lamps, plastic products |
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Remark |
Can be designed according to customers request |
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After getting customer's requirements, we make full manufacturing specifications in details.
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