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Compact Electric Plasma Cleaner for Plasma Surface Modification

Compact Electric Plasma Cleaner for Plasma Surface Modification photo-1
US$ 3,000 - 8,500 MOQ: 1 Set
Key Specifications
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Condition:
New
Place of Origin:
Henan, China
Brand Name:
kejia
Payment & Shipping
Payment Methods:
Port of Shipment:
China port
Delivery Detail:
Delivery time depends on order quantity.
Condition New
Place of Origin Henan, China
Brand Name kejia
Model Number EQ-PDC-32G-LD
Feature Critical Cleaning / Residue Free, Non-Ionic, Non-Toxic, Rust / Corrosion Inhibitor, Sudsing / Foaming
Fuel Electric
Certification CE
Use Other, plasma cleaner
Material Glass / Ceramic

Specifications

compact and low cost plasma cleaner which is designed to clean and remove nanoscale organic contamination

EQ-PDC-32G is a compact and low cost plasma cleaner which is designed to clean and remove nanoscale organic contamination on wafer upto 2" with air, oxygen, or argon plasma. The rate of organic removal is about 10 nm/min Max. at high RF power. It is an excellent tool to pre-clean single crystal substrate before expitaxial film deposition to the acheive a better quality. If you don't have any experience for plasma surface cleaning, please refer to the articles as the follows:
  • McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
  • Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
  • Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177
SPECIFICATIONS
Input Power

AC 110V (for operation under AC220V, we provide additional 500W transformer),

 please select in option bar




RF Power


RF power (High voltage & high frequency current applied on the coil) is adjustable

at three levels:


Low Setting 680V  10 mA  6.8W
Medium Setting 700V  15 mA  10.5W
High Setting 720V  25 mA  18W


Features
  • Compact, tabletop unit
  • Adjustable RF power
  • Low, Medium, and High power settings
  • High purity 3" quartz chamber
  • Safe operation at low cost and environmental freindly

 Plasma Chamber
  • 3" diameter x 6.5" length   high purity quartz chamber
  • A removable front cover assembly


Vacuum Pump and Valve

 Vacuum Pump with Oil Trap, Exhaust Filter -EQ-2XZ is included with pipe for AC220V

voltage. (Ultimate total pressure of 30 mTorr. Only one vacuum pump is included

 in one package)

  • 1/8" NPT needle valve to qualitatively control gas flow and chamber pressure.
  • 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the
  •  chamber, and venting.

Inert gas
  • Many inert gases can be choosen for plasma cleaning, such as N2, Ar
  • , Air and Mixed gas depended on what kind material will be treated. ( not included in the package)
  • No flammable gas shall be used for the plasma cleaner.
Overall dimension     8.5" H x 10" W x 8" D 
 
Net Weight
  • 17 Lbs without pump
  • 37 Lbs with vacuum pump

Compact electric Plasma Cleaner for plasma surface modification

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Compact electric Plasma Cleaner for plasma surface modification

 

Zhengzhou Kejia Furnace Co., Ltd.
Tel.: +86-371-67826992

Fax: +86-371-67197091
Web: 
Mobile No.: +86 18137195603
Skype: tanyawang55
QQ ID: 912950531
Email:export(at) 

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Business Type
Manufacturer, Trading Company
Year Established
2009
Factory Size
1,000-3,000 square meters
Total Employees
101 - 200 People