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Help Center3 Rotary Targets Plasma Sputtering Coater With Vacuum Pump
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3 Rotary Targets Plasma Sputtering Coater with vacuum pump
Brief introduction of the 3 Rotary Targets Plasma Sputtering Coater
CYKY-VTC-16-3H is a CE certified compact Three Rotary Target Plasma Sputtering Coater with a
touch screen digital controller, and a substrate heater capable of heating up to 400°C.
It can coat 1- 3 types of metallic materials to samples with diameters up to 50 mm.
Three sputtering targets, Gold, Silver, Copper are included for immediate use.
Specification of the 3 Rotary Targets Plasma Sputtering Coater
Input Power |
standard configuration: 220V AC, 50/ 60Hz, 700Watts (including vacuum pump) For using under 110VAC we will include a transformer for you. Please select the voltage in option bar. |
Output Power |
1600VDC 40mA max. |
Specimen Chamber Size |
Fused glass tube, 150 mm I.D. Dia x 150mm Height |
|
Heating sample stage
|
One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button. The substrate heater is built in the stage with a max. heating temperature of 500°C PID temperature controller with +/-1°C accuracy is built in touch screen control panel |
Control Panel |
6" color touch-screen control panel with PLC integration for easy operation One panel controls all parameters, including vacuum, current, target position and substrate heating temperature |
|
Vacuum
|
( not included ) Quality two stage vacuum pump with KF25 connector is required , but not included. Built in KF25 vacuum port for connect the coater to a vacuum pump The vacuum pump must plug in socket located in back of coater to achieve automatic control |
Gas Atmosphere |
One needle valve installed to allow Ar gas inlet to achieve better plasma coating |
|
Target
|
Three Targets are included in standard package:
Au, Ag and Cu targets. Size: 47 mm dia.x2.5mm Thick Optional targets is available upon request. Pt , Fe, Ni, Co, Pd, etc Note: Al, Mg, Zn light metal can not be coated using the coater. |
Dimensions |
440mm × 330mm × 300mm (L×W×H) |
neight weight |
50KG |
Detailed photos of the 3 Rotary Targets Plasma Sputtering Coater
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