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Specifications
competetive pricecostomized chamber size
oversea after-sale service
Configuration of machine
Part name |
Specification |
Supplier |
Quantity |
|
Chamber size |
Ø1300mm×H1500mm |
CICEL |
1set |
|
Lining board |
1mm stainless steel |
CICEL |
1set |
|
Workpiece steady |
custom — made |
CICEL |
1set |
|
Rotation system |
Frequency regulation |
CICEL |
1set |
|
Bias power supply |
30kw |
GUANGDONG |
1set |
|
arc power supply |
200A |
GUANGDONG |
12sets |
|
Ti target |
Ø100 |
CICEL |
12pcs |
|
Flow valve |
D07 — 7C series |
BEIJING |
4sets |
|
Flow control instrument |
D07 — 7C series |
BEIJING |
1set |
|
Gas-pressure gauge |
international standard |
CICEL |
1set |
|
Vacuum measurement |
ZDF—5227 |
SICHUAN |
1set |
|
Heating pipe |
9KW |
CICEL |
12sets |
|
valve |
Main valve |
GDQ—800 |
CICEL |
1set |
Rough valve |
GDQ — 200 |
CICEL |
1 set |
|
Front valve |
GDQ — 150 |
CICEL |
1 set |
|
vacuum system |
Diffusion pump |
KT — 800 |
CICEL |
1set |
Mechanical pump |
2X — 70 |
SHANGHAI |
2sets |
|
Roots pump |
ZJY — 600A |
SHANGHAI |
1set |
|
Holding pump |
2X — 15 |
SICHUAN |
1set |
|
Electrical appliances |
Standard equipment |
Omron&Delixi |
1set |
|
HMI |
10.4 inch touch screen |
Xinjie |
1set |
|
Control system |
PLC programming |
Xinjie |
1set |
|
Pumping speed |
5×10 — ²≤5min |
Idle oven |
|
|
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