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Specifications
good after-sales servicecompetetive price
Configuration of machine
Part name | Specification | Supplier | Quantity | |
Chamber size | Ø1300mm×H1500mm | CICEL | 1set | |
Lining board | 1mm stainless steel | CICEL | 1set | |
Workpiece steady | custom — made | CICEL | 1set | |
Rotation system | Frequency regulation | CICEL | 1set | |
Bias power supply | 30kw | GUANGDONG | 1set | |
arc power supply | 200A | GUANGDONG | 12sets | |
Ti target | Ø100 | CICEL | 12pcs | |
Flow valve | D07 — 7C series | BEIJING | 4sets | |
Flow control instrument | D07 — 7C series | BEIJING | 1set | |
Gas — pressure gauge | international standard | CICEL | 1set | |
Vacuum measurement | ZDF—5227 | SICHUAN | 1set | |
Heating pipe | 9KW | CICEL | 12sets | |
valve | Main valve | GDQ — 800 | CICEL | 1set |
Rough valve | GDQ — 200 | CICEL | 1set | |
Front valve | GDQ — 150 | CICEL | 1set | |
vacuum system | Diffusion pump | KT — 800 | CICEL | 1set |
Mechanical pump | 2X — 70 | SHANGHAI | 2sets | |
Roots pump | ZJY — 600A | SHANGHAI | 1set | |
Holding pump | 2X—15 | SICHUAN | 1set | |
Electrical appliances | Standard equipment | Omron&Delixi | 1set | |
HMI | 10.4 inch touch screen | Xinjie | 1set | |
Control system | PLC programming | Xinjie | 1set | |
Pumping speed | 5×10 — ²≤5min | Idle oven | ||
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