Home > Products > Other Brands > ASML MC1AB37 4022.437.1856 Motor Controller
ASML MC1AB37 4022.437.1856 Motor Controller
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Product Details
| Material | Other, Global universal model | Condition | Other, Global universal model | |
| Task | Other, Global universal model | Mathematical Model | Other, Global universal model | |
| Signal | Other, Global universal model | Customized | Non-Customized | |
| Structure | Other, Global universal model | Operating Temperature | 18℃~25℃ | |
| Relative Humidity | 5% - 95% (non-condensing) | Storage Temperature | -40℃~85℃ | |
| Dimensions | 120mm×80mm×30mm |
Product Description
I. Overview
The MC1AB37 sends displacement commands to the servo drive via 8 AO outputs (24-bit resolution, minimum step size of 0.477μV corresponding to ±10V signal, translating to wafer stage displacement precision of ±0.1nm). Simultaneously, it collects the actual position deviation feedback from the laser interferometer via AI (sampling rate 1MHz), and the DSP calculates the compensation value in real time, controlling the wafer stage positioning error within ±0.5nm. This ensures precise alignment (overlay accuracy ≤1.5nm) between the 193nm lithographic pattern and existing patterns on the wafer, increasing the yield of 28nm process chips from 95% to 98%. In lens focusing control, the module outputs focusing commands via 2 AO channels to control the Z-axis displacement of the lens module (precision ±0.3nm), compensating for micro-irregularities on the wafer surface (maximum ±2μm) and preventing blurring of lithographic patterns caused by focal deviations (reducing the scrap rate of individual wafers due to focal issues from 2% to 0.3%). During 24/7 mass production in a semiconductor wafer fab, the MC1AB37 operated continuously for 365 days without faults, with a Mean Time Between Failures (MTBF) ≥50,000 hours. It meets the "year-round non-stop" mass production requirements of semiconductor fabs and reduces capacity losses caused by equipment downtime (daily capacity loss exceeding RMB 5 million).
II. Technical Parameters
1. I/O Channel and Signal Parameters
2. Control Performance Parameters
3. Environmental and Reliability Parameters
III. Functional Features
1. Nanoscale Control Precision for Advanced Process Nodes
2. Strong Electromagnetic Interference Resistance for Complex Lithography Machine Environments
3. High Reliability and Redundancy Design for Uninterrupted Mass Production
4. Exclusive Compatibility with ASML Lithography Machines for System Synergy
Company Profile
Main products: Covering globally renowned brands: Bently Nevada, Triconex, Woodward, Foxboro, Westinghouse, Reliance, Schneider Modicon, ABB, AB (Allen-Bradley), Motorola, GE Fanuc, Yaskawa, Bosch Rexroth Rexroth, ACSO, YOKOGAWA, Rexroth, NI, ICS Triplex, Kollmorgen, Mitsubishi, MOOG, Emerson, B&R B&r, SST, ALSTOM, KUKA EPRO, LAM HIMA dark Horse, HONEYWELL, prosoft, AMAT, SIEMENS, etc. The product categories include: DCS system accessories, robot system spare parts, large servo system spare parts, etc., which are widely used in power, chemical, metallurgy, intelligent manufacturing and other fields.
Contact Us
- Guizhou Yuanmiao Automation Equipment Co., Ltd.
- Contact nameyezi Chat Now
- AddressXixiu District, Anshun, Guizhou
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