Vacuum coating equipment electron-beam evaporative coating machine

Equipment Brief

IKS-OPT2700 is designed for large area optical coating, it is electron-beam evaporative coating machine. The coating machine system is consist of vacuum chamber, vacuum pump, vacuum detection and control, substrate heating system, electron beam evaporation system, ion source assisted deposition system, resistance evaporation system, film thickness monitoring system, working gas volume flow control system, work piece rotation system and automatic coating controlled by PLC. The evaporation material is commonly used of rare metals, like yttrium fluoride, praseodymium fluoride, germanium, zinc sulfide, magnesium fluoride, titanium dioxide, silicon dioxide, zirconia, cobalt, gallium, selenium and other metals. Copper, molybdenum, silicon, germanium and other metals are commonly used in the optical materials of reflectors. it can be coating visible light color film, aluminum reflective film, AF anti-fingerprint film, low melting point organic film, visible light spectroscopic film, visible light anti-reflection film,etc.

Equipment Parameters

Application