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Help CenterSingle/both Side Polished Epi-ready Sapphire Wafers
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Specifications
1 High Precision2 Competitive Price
3 Quick Delivery
4 Custom Size Available
Description:
Specifications
Sapphire wafers
1.Dia:50.8,76.2mm,100mm
2.thickness:330/430/500um
3.orientaion:C/R/A/M plane
4.package:clean room
Epi-ready Sapphire wafers(sngle polished or both polished)
Sdhengjing provides sapphire wafer with complete orientation options including C plane , A plane , R plane and M plane , in diameter range from 1" to 4" , square substrate is also available as well , size from 10 x 10 mm to 100 x 100 mm .
Substrate are produced as per SEMI standards, it has good surface finish Ra < 5A and high cleanliness, we can offer epi ready grade sapphire wafer for your epitaxial growth. Sapphire wafer are produced by Czochralski method, due to it's high strength, high anti-corrosion high anti-abrasion, low dielectric loss and good electrical insulation, single crystal sapphire wafer plays an increasingly important role as a material for blue LED and high Tc superconductor and microwave applications. Contact us for further information on price & delivery time.
Applications
sapphire wafer plays an increasingly important role as a material for blue LED and high Tc superconductor
and microwave applications.
parameters:
| Crystal Materials | 99.995% High Purity, 2-3 Grade Monocrystalline Al2O3 | ||
| Wafer Surface Orientation | C-axis(0001) offset to M (1-100) / A (11-20) 0.2°±0.05° / 0.3°±0.1° / ±0.25° | ||
| Diameter | 50.8mm ± 0.1mm / 76.2mm ± 0.25mm / 100.0 ± 0.4mm / 125.0 ± 0.3mm / 150.0 ± 0.3mm | ||
| Thickness | 330um ± 10um | 430um ± 10um | 500um ± 15um |
| Major Flat | A-axis (1 1-2 0) ± 0.2° | ||
| Major Flat Length | 16.0mm ± 1.0mm / 22.0mm ± 1.0mm / 32.5 ± 1.0mm / 47.5 ± 2.5mm | ||
| Minor | None | ||
| Front Surface Finish | Epi polished, Ra< 0.20nm | ||
| Back Surface | SSP: Fine ground, Ra 0.4 to 1.0um; DSP: Polished | ||
| Edge condition | Edge defects not to exceed SEMI M3-91 | ||
| TTV | <15um | <10um | <10um |
| BOW | <15um | <10um | <10um |
| Warp | <15um | <10um | <10um |
| Bubble & Color | None by visual inspection in intensive light | ||
| Ground Boundary | None by visual inspection in fluorescent light | ||
| Cleanliness | Free visible contamination | ||
| Packaging | Packaged in a class 100 clean room environment, in cassettes of 25pcs or single fluroware, under a nitrogen atmosphere. | ||
| Note | R-plane (1-1 0 2), A-plane (1 1-2 0 ), and M-plane(1-1 0 0) are available; Customer's specification not listed above is also available upon request. | ||
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