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Specifications
1.extend workpiece service life2.improve the workpiece hardness
3.enhance wear resistance
The specification of LD-820 multiple multi-arc + magnetron sputteringion vacuum coating equipment
A-Computer automatic control B-switch board manual
Specification and model |
LD-820A/B |
Remarks |
Vacuum Chamber Inner Size |
¢900-1000×h900-1000(mm) |
The size can be increased or decreased±10% |
Effective coating space |
¢800-900×h700-800(mm) |
The size can be increased or decreased±10% |
Workpiece rotary frame |
Rotation + revolution and rotation |
Design according to the specific requirements |
The layout of the rotary frame |
The top of Vacuum Chamber downward install |
lower, upward install, can be instead |
Quantity of the hanging rod |
4 rotation +8 revolution and rotation |
Can design according to the workpiece quantity |
Rotary speed |
0-5revolutions/minuterotationspeed governor adjust |
variable-frequency governor |
The maximum size of the workpiece |
¢170-180×h650-750(mm) rotation |
Hanger quantities and rotation radius |
Application |
Tools coating+ Decorative coating |
|
Workpiece material |
Metal, glass, ceramics, plastics etc. |
Almost all material |
Film material |
TiN, TiAlN, CrN, TiC, TiCN, etc. |
Tools film, Multilayer film, Decorative film |
Requirement of production space |
7×8m |
Leave the space of operation and maintenance |
Requirement of capacitance |
50Hz 380V 70KVA |
Installed capacity not practical power consumptive |
Requirement of cooling water |
3ton/hour circulating cooling water/ 25 |
|
Pollutant emission |
none |
None exhaust gas, wastewater, none scrap |
Work noise |
≤90decibel |
|
Vacuum air pump |
2X-70rough pump+2X-30maintain pump |
|
Roots pump |
ZJP-150 |
Can increase |
Diffusion pump |
KT-400 |
Can replace molecular pump according to the requirement |
Ultimate vacuum |
Overmatch 6×10-4 Pa |
|
Work vacuum |
6.67×10-3 Pa |
|
Exhaust speed |
<20minutes(atmospherework vacuum) |
Normal temperature |
Pressure rising rate(leak rate) |
≤0.35Pa/h |
|
Vacuum chamber material |
304stainless steel |
|
Rotary frame material |
8 dynamoelectric striking the arc indirect cooling |
Direct cooling can instead |
Target size |
¢100×40(mm) |
|
Magnetron sputtering target |
2(direct cooling) |
Indirect cooling can instead |
Sputtering target size |
w100-150×h700-800(mm) |
|
Grid bias power supply |
30KW 20KHz Inverter power supply |
The power can change according to the capacity |
magnetron sputtering power supply |
30KW 40KHz intermediate frequency pulse power source |
|
Voltaic arc power supply |
8 0-200A electric current tunable |
|
Vacuum chamber heating power |
18KW temperature PID adjust |
|
Control mode |
Automatic(A) Manually operation(B) |
Automatic control type have hand control |
Automatic control system (A) |
Industry control computer+ PLD+ LCD+ printer |
Can control by touch screen |
Note: would you please let us know the following information, before we quote the machine for you.
1. what is the name of the workpiece which you want to coat? It is highly appreciated that if you can send us the picture of your workpiece.
2.the material and the size of the workpiece.
3.how many workpieces do you want to coat at the same time, it will help us design the suitable vacuum chamber which is the most important fact of the price.
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