Si Target 5N or 6N Silicon Target Sputtering Target
silicon target 5N or 6N
Type: Single crystal Si target and Poly crystal Si target
Purity: Si:99.999%, min and 99.9999% min.
Resistivity: 0.02ohm·cm max. ,0.02ohm·cm max.or 0.5-5 ohm·cm
Size:
Length:300mm max.,
Width:125mm max.,
Thickness: 2mm-20mm
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