Silicon Rotary Target
Silicon Rotary target
please kindly refer to the following sheet.
Product Name |
Silicon Rotary Target |
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Crystalline Type |
Mono and Poly |
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Conductivity Type |
P Type |
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Purity |
5N 99.999% |
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Resistivity |
0.005-0.02 ohm-cm |
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|
Specifications |
Length |
225mm max. each tube |
|
Outer diameter |
163mm max. |
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Inner diameter |
135mm |
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Regular WT |
6mm/9mm/14mm |
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Tolerances |
As per drawing |
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Advantage |
High utilization rate, 50% higher than spraying Si rotary target |
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Remarks |
We can bond the tubes together as the photo attached |
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For more information, please feel free to contact us.
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