Ultra-hard PVD Coating Machine
Ultra-hard PVD coating machine
Ultra-hard
1.Feature:
1.Equiped with rectangular arc sources and anode layer ion source
2.Three-channel feedback control system:arc sources,gas path,deposition process
3.Octahedral Chamber:
a.Promotion of space utilizatin and reliablity for using
b.Designed flecibly to obtain the best deposition effect
c.Convenient mainteance and also easy to be repaired
2.Superhard Coating:
TiN,TiC,CrN,CrC,TiN,AlTiN,DLC
3.Application:
tool,cutting tool,drill,cutter,precision part and electronic product
3.Technical parameter:
| VAKIA-HTC Tooling Coating Machine | |||
| Model | VAKIA-HTC-700 | VAKIA-HTC-900 | VAKIA-HTC-1000 |
| Size of vacuum chamber | Ø700×H900mm | Ø900×H1100mm | Ø1000×H1200mm |
| Type of power | Arc power supply, filament power supply, pulse bias supply | ||
| Structure of vacuum chamber | Vertical front door structure, rear air exhaust system and double-layer water cooling chamber | ||
| Material of vacuum chamber | superior stainless steel vacuum chamber | ||
| Ultimate vacuum | 6.0×10-4Pa | ||
| Pumping time (unload,clean vessel) | from air to 8.0×10-3Pa less than 15minutes | ||
| Vacuum system | Diffusion pump or molecular pump + Roots pump + Mechanical pump + rotary vane mechanical pump (the specific model can be configured according to customer requirements) | ||
| Coating types | Carbide tool coating | ||
| Arc source | 6sets | 6sets or 8sets | 8sets or 10sets |
| Bias power supply | 20KW/1set | 30KW/1set | 30KW/1set |
| Rotating mode of workpiece turntable | Planetary revolution and rotation, variable frequency speed regulation (controllable and adjustable) | ||
| Workpiece baking temperature | Controllable and adjustable from room temperature to 550°C (PID temperature control) | ||
| Process gas | 3-path or 4-path process gas flow control and display system, selective automatic gassing system | ||
| Cooling mode | Water circulation cooling mode, cooling water tower or industrial water cooler or deep cooling system. (Provided by customers) | ||
| Control mode | Manual/automatic integration mode, touch screen operation, PLC or computer control | ||
| Total power | 25KW | 30KW | 35KW |
| Alarm and protection | Alarm water shortage, overcurrent and overvoltage, short circuit and other abnormal conditions of pumps, targets and so on also execute relevant protective measures and electric interlock function | ||
| Occupy space | W2m×L3m | W2.5m×L3.5m | W3m×L4m |
| Other technical parameters | Water Pressure ≥0.2MPa, Water Temperature ≤25°C, Air Pressure 0.5-0.8MPa | ||
| Remarks | The specific configuration of coating equipment can be designed according to process requirements of coating products | ||
4. Ultra-hard PVD coating machine samples:
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