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Home > Manufacturing & Processing Machinery > Metallic Processing Machinery > Metal Electroplating Machine > Vacuum Evaporators Combination With Magnetron Sputtering Coating Machine
Vacuum Evaporators Combination With Magnetron Sputtering Coating Machine
US$ 98,000 - 100,000
MOQ: 1 Set
Key Specifications
Get Latest Price
Condition:
New
Place of Origin:
Shanghai, China
Brand Name:
Vakia
Payment & Shipping
Payment Methods:
Port of Shipment:
Shanghai
Delivery Detail:
Delivery time depends on order quantity.
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Condition
New
Place of Origin
Shanghai, China
Brand Name
Vakia
Model Number
Optional
Voltage
380V
Power(W)
40KW
Dimension(L*W*H)
3x4x2m
Weight
2000-4000kg
Certification
CE
Warranty
1 year
After-sales Service Provided
Engineers available to service machinery overseas
vacuum evaporators combination with magnetron sputtering coating machine
1. Summary Technical Parameters
|
Model Function |
VAKIA -SRC -900 | VAKIA -SRC -1000 | VAKIA -SRC -1200 | VAKIA -SRC -1400 | VAKIA -SRC -1500 | VAKIA -SRC -1800 |
|
Vacuum Chamber Inner Size |
900 *H1100 mm | 1000 *H1200 mm | 1200 *H1500 mm | 1400 *H1800 mm | 1500 *H1900 mm | 1800 *H2000 mm |
| Power Supply Type | Resistance Evaporation Power Supply,Ion bombardment Power Supply,Filament power supply,Pulse Bias Power Supply,Direct Current magnetron power Supply,Medium Frequency Magnetron Power Supply | |||||
| Structure of Vacuum Chamber | Vertical Double Door,Vertical Single Door,Horizontal Single Door,Back Vacuum Acquisition System | |||||
| Material of Vacuum Chamber | Superior Stainless Steel Chamber | |||||
| Ultimate Vacuum | 8.0×10-4Pa | |||||
| Pump-out Time(no-load) | From air to 5.0×10-2Pa≤8min | |||||
|
Vacuum Acquisition System |
Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer’s demand) | |||||
| Coating Style | Evaporation coating+magnetron sputtering coating | |||||
| Kinds of Film |
metal film,semi-transparent film,Non conductive vacuum metallization film Electromagnetic Interference film,Dielectric film |
|||||
| The Style of Magnetron target | Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target | |||||
|
Power of Magnetron bias power supply and the number of magnetron target |
The appropriate equipment is selected according to demanders’requirements and different techniques | |||||
|
Work Piece Rotation maximum valid diameter |
6 axis 260mm | 6 axis280mm |
6 axis 360mm 8 axis 280mm |
6 axis 420mm 8 axis 350mm |
6 axis 460mm 8 axis 380mm |
6 axis 560mm 8 axis 460mm |
| Evaporation electrode | Standard configure 2 pair | |||||
| Evaporation Power | 15KW | 15KW | 20KW | 25 KW | 30KW | 35KW |
| Total Power | 50KW | 50KW | 65KW | 85 KW | 100KW | 135KW |
| Process Gas | Two or three process gas flow control and display system,select automatic filling system | |||||
| Cooling System | Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed(which are supplied by demander) | |||||
|
Work Piece Rotating Stand and Rotating Style |
Planetary revolution-autorotation and frequency conversion speed regulation (controlled and adjustable) |
|||||
| Control Mode | Automatic and Manual operation modes integrated,touch screen,PLC or computer control | |||||
|
Alarm and Protection |
It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock. | |||||
| Cover Area | W3m×L3m | W3m×L3m | W3.5m×L4m | W5m×L5m | W6m×L6m | W6m×L8m |
|
Other Technical Parameters |
Water pressure≥0.2MPa,water temperature≤25 centigrade,gas pressure0.5-0.8MPa | |||||
| Remark |
Designed flexible and select the appropriate equipment according to demanders’requirements |
|||||
2. Summary Description
VAKIA-SRC evaporation combination with magnetron sputtering vacuum coater combine vacuum evaporation technology with magnetron sputtering, realizing multi-functional coating demand. This machine equipped with high efficient resistance heating evaporation device and advanced cylindrical or plane magnetron sputtering device. This composite machine can acquire a variety of film with different performance. It has a wide range of applications for such industries as plasticceramic and metal products with the following colors as goldensilverblackorchidredpurplegrey and rainbow colors available.
3. Coated Samples
Send Inquiry to This Supplier
Business Type
Manufacturer, Trading Company
Year Established
2009
Factory Size
Above 100,000 square meters
Total Employees
51 - 100 People
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