vacuum evaporators combination with magnetron sputtering coating machine

Name: vacuum evaporators combination with magnetron sputtering coating machine
Brand: Vakia
Price: USD $98,000 - 100,000 / Set

FOB Price

USD $98,000 - $100,000 / Set

1 Set(Min.Order)

Supply Ability 15 Set / Sets per Month
Port Shanghai
Payment Terms:T/T

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Product Details

Condition:	New	Place of Origin:	Shanghai, China	Brand Name:	Vakia
Model Number:	Optional	Voltage:	380V	Power(W):	40KW
Dimension(LWH):	3x4x2m	Weight:	2000-4000kg	Certification:	CE
Warranty:	1 year	After-sales Service Provided:	Engineers available to service machinery overseas

Product Description

vacuum evaporators combination with magnetron sputtering coating machine

1. Summary Technical Parameters

Model Function	VAKIA -SRC -900	VAKIA -SRC -1000	VAKIA -SRC -1200	VAKIA -SRC -1400	VAKIA -SRC -1500	VAKIA -SRC -1800
Vacuum Chamber Inner Size	900 *H1100 mm	1000 *H1200 mm	1200 *H1500 mm	1400 *H1800 mm	1500 *H1900 mm	1800 *H2000 mm
Power Supply Type	Resistance Evaporation Power Supply,Ion bombardment Power Supply,Filament power supply,Pulse Bias Power Supply,Direct Current magnetron power Supply,Medium Frequency Magnetron Power Supply
Structure of Vacuum Chamber	Vertical Double Door,Vertical Single Door,Horizontal Single Door,Back Vacuum Acquisition System
Material of Vacuum Chamber	Superior Stainless Steel Chamber
Ultimate Vacuum	8.0×10-4Pa
Pump-out Time(no-load)	From air to 5.0×10-2Pa≤8min
Vacuum Acquisition System	Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer’s demand)
Coating Style	Evaporation coating+magnetron sputtering coating
Kinds of Film	metal film,semi-transparent film,Non conductive vacuum metallization film Electromagnetic Interference film,Dielectric film
The Style of Magnetron target	Rectangle magnetron target,cylindrical magnetron target,twin magnetron dual target
Power of Magnetron bias power supply and the number of magnetron target	The appropriate equipment is selected according to demanders’requirements and different techniques
Work Piece Rotation maximum valid diameter	6 axis 260mm	6 axis280mm	6 axis 360mm 8 axis 280mm	6 axis 420mm 8 axis 350mm	6 axis 460mm 8 axis 380mm	6 axis 560mm 8 axis 460mm
Evaporation electrode	Standard configure 2 pair
Evaporation Power	15KW	15KW	20KW	25 KW	30KW	35KW
Total Power	50KW	50KW	65KW	85 KW	100KW	135KW
Process Gas	Two or three process gas flow control and display system,select automatic filling system
Cooling System	Water-cooling circulatory system,cooling water tower or industrial cooling water machine is also needed(which are supplied by demander)
Work Piece Rotating Stand and Rotating Style	Planetary revolution-autorotation and frequency conversion speed regulation (controlled and adjustable)
Control Mode	Automatic and Manual operation modes integrated,touch screen,PLC or computer control
Alarm and Protection	It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock.
Cover Area	W3m×L3m	W3m×L3m	W3.5m×L4m	W5m×L5m	W6m×L6m	W6m×L8m
Other Technical Parameters	Water pressure≥0.2MPa,water temperature≤25 centigrade,gas pressure0.5-0.8MPa
Remark	Designed flexible and select the appropriate equipment according to demanders’requirements

2. Summary Description

VAKIA-SRC evaporation combination with magnetron sputtering vacuum coater combine vacuum evaporation technology with magnetron sputtering, realizing multi-functional coating demand. This machine equipped with high efficient resistance heating evaporation device and advanced cylindrical or plane magnetron sputtering device. This composite machine can acquire a variety of film with different performance. It has a wide range of applications for such industries as plasticceramic and metal products with the following colors as goldensilverblackorchidredpurplegrey and rainbow colors available.

3. Coated Samples

Contact Us

Shanghai Vakia Coating Technology Co., Ltd.: Contact namevakiash Lin; Phone0086-21-57728812; AddressWorkshop 4, No. 888, Kun'gang Road, Xiaokunshan Town

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vacuum evaporators combination with magnetron sputtering coating machine

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