Vacuum Coating Company for Electron Device

Vacuum Coating Company for Electron Device photo-1
Vacuum Coating Company for Electron Device photo-2
US$ 60,000 - 120,000 MOQ: 1 Set
Key Specifications
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Condition:
New
Place of Origin:
Shanghai, China
Brand Name:
Vakia
Payment & Shipping
Payment Methods:
Port of Shipment:
Shanghai
Delivery Detail:
Delivery time depends on order quantity.
Condition New
Place of Origin Shanghai, China
Brand Name Vakia
Model Number Optional
Voltage 380V
Power(W) According to the configuration for the machine
Dimension(L*W*H) According to the configuration for the machine
Weight According to the configuration for the machine
Certification CE
Warranty 1 year
After-sales Service Provided Engineers available to service machinery overseas

vacuum coating for electron device

 

 

1. Summary Technical Parameters:

 

    Model
 
Function      
VAKIA
-ASC
-700
VAKIA
-ASC
-900
VAKIA
-ASC -1000
VAKIA
-ASC
-1250
VAKIA
-ASC
-1400
VAKIA
-ASC
-1600
Vacuum Chamber
Inner Size
φ700
*H900
mm
φ900
*H1100
mm
φ1000
*H1200
mm
φ1250
*H1350
mm
φ1400
*H1600
mm
φ1600
*H1800
mm
Power Supply Type Arc Power Supply, Filament power supply, Pulse Bias Power Supply,
Direct Current magnetron power supply, Medium Frequency
Magnetron Power Supply, Radio Frequency Magnetron Power
Source, Linear Ionization Source
Structure of Vacuum Chamber Vertical Front Door Structure, Back Pump-out System, Double Water Cooling Chamber
Material of Vacuum Chamber Superior Stainless Steel Chamber
Ultimate Vacuum 6.0×10 -4 Pa
Pump-out Time(no-load)
 
From air to 8.0×10 -3 Pa≤15min
Vacuum Acquisition
System
Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer's demand)
Coating Style Cathodic arc coating+magnetron sputtering coating
Kinds of Film Decoration film(TiN, TiC, ZrN, TiALN, CrN)   metal film,  reaction film
The Style of Magnetron target Rectangle magnetron target,  cylindrical magnetron target,  twin magnetron dual target
 
Power of
magnetron power supply
and the
number of
magnetron target
The appropriate equipment is selected according to demanders'requirements and different techniques
Arc Power
Supply
4 or 6 sets 6 or 8 sets 8 or 10 sets 10 or 12 sets 14 or 16 sets 16 or 18 sets
Bias Power
Supply
10KW/set 20KW/set 20KW/set 30 KW/set 40KW/set 50KW/set
Work Piece
Rotating Stand and Rotating
Style
Planetary revolution-autorotation and frequency conversion speed regulation
(controlled and adjustable)
Heating temperature of Work Piece It can be controlled and adjustable when the room temperature is450ºC(PID control)
 
Process Gas Three or four process gas flow control and display system,select automatic filling system
Cooling System Water-cooling circulatory system,cooling water tower or industrial cooling water machine or deep cooling system is also needed(which are supplied by demander)
Control Mode Automatic and Manual operation modes integrated,  touch screen,  PLC or computer control
Total Power 40KW 45KW 50 KW 60KW 75KW 90KW
Alarm and
Protection
It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock.
Cover Area W2m×L3m W2.5m×L3.5m W3m×L4m W4m×L5m W4.5m×L6m W5m×L7m
Other Technical
parameters
Water pressure≥0.2MPa, water temperature≤25ºC, gas pressure0.5-0.8MPa
Remark Designed flexible and select the appropriate equipment according to
demanders'requirements

 

 

2. Features:

 

Cathodic arc deposition together with medium frequency magnetron sputtering, wide range of application
Metal amd alloy coatings, Multi-layer hybrid coatings and compounds coatings, coatings characterized by: High bright fine and smooth, high hardness, wear resistance, corrosion resistance and decorative
IPG, TiN, TiC, TiCN, TiALN, CrN, Cu, DLC can be deposited.

 

3. Coated Samples:

 

 

vacuum coating company for electron device 

 

 

vacuum coating company for electron device

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Business Type
Manufacturer, Trading Company
Year Established
2009
Factory Size
Above 100,000 square meters
Total Employees
51 - 100 People