Vacuum Coating Company for Electron Device
vacuum coating for electron device
1. Summary Technical Parameters:
|
Model Function |
VAKIA -ASC -700 |
VAKIA -ASC -900 |
VAKIA -ASC -1000 |
VAKIA -ASC -1250 |
VAKIA -ASC -1400 |
VAKIA -ASC -1600 |
|
Vacuum Chamber Inner Size |
φ700 *H900 mm |
φ900 *H1100 mm |
φ1000 *H1200 mm |
φ1250 *H1350 mm |
φ1400 *H1600 mm |
φ1600 *H1800 mm |
| Power Supply Type |
Arc Power Supply, Filament power supply, Pulse Bias Power Supply, Direct Current magnetron power supply, Medium Frequency Magnetron Power Supply, Radio Frequency Magnetron Power Source, Linear Ionization Source |
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| Structure of Vacuum Chamber | Vertical Front Door Structure, Back Pump-out System, Double Water Cooling Chamber | |||||
| Material of Vacuum Chamber | Superior Stainless Steel Chamber | |||||
| Ultimate Vacuum | 6.0×10 -4 Pa | |||||
|
Pump-out Time(no-load) |
From air to 8.0×10 -3 Pa≤15min | |||||
|
Vacuum Acquisition System |
Diffusion pump or molecular pump+Roots pump+Mechanical pump+Holding pump(The specification can be selected according customer's demand) | |||||
| Coating Style | Cathodic arc coating+magnetron sputtering coating | |||||
| Kinds of Film | Decoration film(TiN, TiC, ZrN, TiALN, CrN) metal film, reaction film | |||||
| The Style of Magnetron target |
Rectangle magnetron target, cylindrical magnetron target, twin magnetron dual target |
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|
Power of magnetron power supply and the number of magnetron target |
The appropriate equipment is selected according to demanders'requirements and different techniques | |||||
|
Arc Power Supply |
4 or 6 sets | 6 or 8 sets | 8 or 10 sets | 10 or 12 sets | 14 or 16 sets | 16 or 18 sets |
|
Bias Power Supply |
10KW/set | 20KW/set | 20KW/set | 30 KW/set | 40KW/set | 50KW/set |
|
Work Piece Rotating Stand and Rotating Style |
Planetary revolution-autorotation and frequency conversion speed regulation (controlled and adjustable) |
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| Heating temperature of Work Piece |
It can be controlled and adjustable when the room temperature is450ºC(PID control) |
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| Process Gas | Three or four process gas flow control and display system,select automatic filling system | |||||
| Cooling System | Water-cooling circulatory system,cooling water tower or industrial cooling water machine or deep cooling system is also needed(which are supplied by demander) | |||||
| Control Mode | Automatic and Manual operation modes integrated, touch screen, PLC or computer control | |||||
| Total Power | 40KW | 45KW | 50 KW | 60KW | 75KW | 90KW |
|
Alarm and Protection |
It has the function of alarm in case of the existence of abnormal conditions like water failure or over-current or over-voltage disconnection.It can carries out protective measurements and has the function of interlock. | |||||
| Cover Area | W2m×L3m | W2.5m×L3.5m | W3m×L4m | W4m×L5m | W4.5m×L6m | W5m×L7m |
|
Other Technical parameters |
Water pressure≥0.2MPa, water temperature≤25ºC, gas pressure0.5-0.8MPa | |||||
| Remark |
Designed flexible and select the appropriate equipment according to demanders'requirements |
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2. Features:
Cathodic arc deposition together with medium frequency magnetron sputtering, wide range of application
Metal amd alloy coatings, Multi-layer hybrid coatings and compounds coatings, coatings characterized by: High bright fine and smooth, high hardness, wear resistance, corrosion resistance and decorative
IPG, TiN, TiC, TiCN, TiALN, CrN, Cu, DLC can be deposited.
3. Coated Samples:

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