Magnetron Sputtering Coating + ITO PET Film+ Batch Vacuum Coating System
Standard applications: PET, glass, to generate ITO coating layers.
Work Pieces:
Size: 300mm*100mm
Thickness of PET: 0.175mm+/-0.05mm
*hickness of ITO Film:185nm+/-5nm
Sheet resistance: 6~8ohm/sq
Technical Configurations:
1) DC Sputtering Sources: Cu, Al, ITO
2) MF Sputtering Sources
3) Turbo Molecular pump + Backing Pump group
4) High
5) Cu, Al, Si targets utilization rate > 35%
6) Deposition Rate: 30nm m/min ~ 40nm m/min
7) Sputtering Uniformity Area: 350mm
Please contact us for a further communication.
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