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Product Description
This MSC-Series Magnetron Sputtering coating machine consist of vacuum coating chamber, vacuum pumping system, deposition system, cooling system , electrical control system , workpiece rotating rack , and others.
Film Function:
Decorative film, functional coating.
Application field:
The substrates can be plastic, ceramics, glass etc.
Product Characteristic
1) With fast film deposition rate, bright color, and almost all the color can be done.
2) The film that is good density, high purity and uniform.
3) Cleanness, pollution-free, instead of water plating.
4) Advanced control system and easy to operate, deposited at various workpiece.
Film color
Most of the color can be coated such as golden, silver, red, purple, blue, gray, black and multi-color and makes the product look more graceful and attractive.
Main Technology Specifications:
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property type |
MSC-900 |
MSC-1000 |
MSC-1250 |
MSC-1200 |
MSC-1400 |
MSC-1600 |
chamber size(mm) |
900x900 |
1000x1200 |
1250x1200 |
1200x1400 |
1400x1600 |
1600x1800 |
power supply type |
Filament supply, pulsed bias supply, DC magnetron supply, Medium frequency magnetron supply, RF magnetron supply |
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chamber structure |
vertical double door, rear exhausting system |
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chamber material |
High grade SUS 304 |
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ultimate vacuum |
6.0×10-4Pa |
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pumping time / no-load |
From atmosphere to 8.0×10-3Pa≤10min |
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vacuum system |
diffusion pump/ molecular pump+ roots pump + mechanical pump + maintain pump |
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coating way |
magnetron sputtering coating |
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coating type |
metal films , reflection films, compound films(nitride, oxide),multi layer films, semiconductor films |
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target type |
rectangle /cylindrical / twin magnetron target |
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target quantity |
Equipment according to different coating process and customers' requires |
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workpiece rotation stand |
planetary rotation, frequency control |
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cooling way |
water circulatory cooling with cooling tower or cryogenic system |
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control type |
manual / automatic , touch screen , PLC or computer control |
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alarm and maintain |
alarm for lacking water or other abnormalities and automatic protect |
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