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Help CenterMagnetron Plasma Sputtering Coater Machine Small PVD Coating Machine Gold, Chrome and Black Oxide Quality Choice
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DC Magnetron Sputtering Coater machine w Rotary Stage & Water Chiller - VTC-16-SM
Introduction of magnetron sputtering machine
magnetron sputtering machine
VTC-16-SM is a High Power Desktop Magnetron Plasma Sputtering Coater with a water cold 2" target head , water chiller and rotatable sample holder, which is designed for coating all metallic films, including Zn, Al, Ti light metallic film at affordable cost. One Aluminium target is included for immediate use.
Technical parameters of magnetron sputtering machine
Input Voltage | 110/220VAC switchable |
Output Power | 1600VDC 250W 150mA max. Built-in over current (>150mA) protection |
Specimen chamber | Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height |
Sputtering Head & Specimen stage | 2“ magnetron sputtering head with water cooling jaket is included ( click PIC below-left to see specs ) One 50 mm Dia stainless steel .sample stage is built in, which is rotable from 0 - 5 RPM One manually operated shutter is build in to achieve better coating ( click PIC below -right to see detail ) Built in a fixture to place sputtering head when open chamber Distance between sputtering head and sample stage is adjustable from 60 - 100 mm. One Air Cold Recirculating Water Chiller 10L / min Flow is included for cooling sputtering head.
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Control Panel | 6" color touch-screen control panel with PLC integration for easy operation One panel controls all parameters, including vacuum, current, target position and substrate heating temperature |
Ultimate Vacuum Pressure | Built in KF25 vacuum port The system requires a Ar gas tank with pressure regulator, which is not included <10E-2 mbar by vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets (not sensitive to air) 7.5E-5 mbar by Turbo molecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air) |
Gas Atmosphere | One needle valve installed to allow Ar gas inlet to achieve better plasma coating The system requires an Ar gas tank with pressure regulator which is not included |
Target | Target size: 50 mm dia. x (0.1 - 3) mm,thickness One 2" Aluminium target is included Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc. These targets are available upon request. Aluminum Target Recommend Coating Method |
Optional Film Thickness Monitor | Film thickness monitor is optional at extra cost ( click PIC below-left to see specsand order ) Heatable sample stage upto 500oC is available upon request at extra cost |
Overall Dimensions | ( L 440mm×W 330mm × H 290mm without sputtering head ) |
Warranty & Certificate | One year limited with lifetime support CE certified |
Thickness monitor for magentron sputtering machine
Overall dimensions of magentron sputtering machine/system
Other types of magnetron sputtering machine
1.One year free warranty.
2.All machines are debugged before shipment.
3.Lifetime technical support and service.
4.24 hours on line or phone or by email technical support.
5.We offer detailed machine manual and software manual.
6.Our factory make a vivid training CD.
7.Life-long free maintenance.
8.Free training in our factory.
Welcome to visit our factory, learn machine face to face.
24-hours online service makes your inquiry be reply immediately.
Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus on Our main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.
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