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Help CenterMass Flow Controller ( MFC ) for Tube Furnace CVD System
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mass flow controller ( MFC ) for tube furnace CVD system
The gas control system is designed for the control of 1-4 types of gases flowing through vacuum-sealed tube furnaces at a low cost. The gas control system is installed in a heavy duty mobile
cart where the tube furnace can be placed on the top. The front panel in the system has adjust valves
and displays for the flow rate of gases. By combining with tube furnaces, it can be used as CVD system
and annealing furnace to study the gas environmental influence has on materials.
Specification of the gas control system MFC (mass flow controller ):
Function | Two Channels | Three Channels | Four Channels |
Mass Flow Controller
| Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 1~500 SCCM | Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 0~500 SCCM | Voltage: 185~245V 50/60Hz Max. Output Power: 18W Working Temperature: 5~45 ºC Max. Pressure: 3x106 Pa Accuracy: ±1% FS Controlling Range: Controller : 0~500sccm |
Removabiligy | 4 heavy duty wheels included Max load: 500 Lbs | ||
Mechanical Pressure Gauge | Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid) | ||
Needle Valve | 316 Stainless Steel | ||
Pipe fitting | Pipe fitting: 1/4" stainless steel 12'' length 1/4" ID Nylon pipe for immediate use | ||
Gas mixing tank | Φ80X120mm | ||
Stop valve | 316 stainless steel needle valve, Φ1/4” | ||
Dimension | 600x600x650 mm | ||
Compliance | CE certified | ||
Warranty | One year limited with lifetime support | ||
Detailed photos of the gas flow controller:
The gas controller system with flowmeter
CVD system with the MFCS:
plywood case
How to contact us?
Send your inquiry details in the below for quotation of the gas controller system, click " send" now.
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