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Graphite Heater field for semiconductor industry
| INTRODUCTION: |
Graphite Heater field for semiconductor industry
are used in the high temperature furnace with temperature reached 2200 degree at vacuum environment and 3000 degree in the deoxidized and inserted gas environment.
Advantages of Graphite Heater for powder metallurgy :
1, uniformity of heating structure.
2, good electrical conductivity and high electrical load.
3, corrosion resistance.
4, inoxidizability.
5, high chemical purity.
6, high mechanical strength.
The advantage is energy efficient, high value and low maintenance.
We can produce anti-oxidation and long life-span graphite crucible, graphite mold and all parts of graphite heater.
| TECHNICAL SHEET:(COMMON MODELS) |
Technical Specification |
JSMC-3 |
JSMC-4 |
JSMC-5 |
Bulk Density (g/cm3) |
≥1.72 |
≥1.78 |
≥1.85 |
Ash Content (PPM) |
≤1000 |
≤1000 |
≤1000 |
Shore Hardness |
≥40 |
≥40 |
≥45 |
Specific Resistance (μ.Ω.m) |
≤12 |
≤12 |
≤10 |
Flexural Strength (Mpa) |
≥30 |
≥35 |
≥40 |
Compressive Strength (Mpa) |
≥50 |
≥60 |
≥70 |
Max. Grain Size (μm) |
≤43 |
≤43 |
≤43 |
Coefficient of Thermal Expansion Mm/°C |
≤4.5*10-6 |
≤4.5*10-6 |
≤4.4*10-6 |
We can supply below related graphite parts:
various kinds of heating elements, heating chamber, hearth, heating tube, bracket, joint board, graphite adjusting plate, joint part, graphite tie-in of conducting rod, graphite heater, graphite insulated chamber, graphite tray, graphite box for sintering, graphite plate, heater tube, bridge frame, connection patrs, electrode joint, insulation barrel and heat shield for heating system etc.
| PRODUCING TECHNOLOGY: |
1. Quality assurance,we use high grade raw material and do strict inspect during the whole procession. All products adopt GB,ISO,ASTM,BS,JIS and DIN standard as per requirement. ISO, BV, TUV, SGS certified.
2. Provide professional designing solution, field technical assitance and any other consulting.
3. Price advantage, provided by manufacturer directly,save much intermediate fees.
4. Professional team, specialized in refractory production since 2000,with advanced technology and vast experience.
5. High production capacity, fast delivery of goods.
6. 24*7 online service.
7. OEM service available.
| CONTACT: |
David Li (International sale)
Email: david_li(at); Mobile(Whatsapp): 0086 158 3750 6496; Wechat: lifanya8888;
Skype: live:lushanyaxing_1
Send Inquiry to This Supplier
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