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Specifications
multi arc vacuum coating machineultral coating
customized chamber size
Configuration of machine
Part name | Specification | Supplier | Quantity | |
Chamber size | Ø1524mm×L2032mm | CICEL | 1set | |
Lining board | 1mm stainless steel | CICEL | 1set | |
Workpiece steady | custom—made | CICEL | 1set | |
Rotation system | Frequency regulation | CICEL | 1set | |
Bias power supply | 50kw | SANSHI | 1set | |
arc power supply | 200A | SANSHI | 16sets | |
Ti target | Ø100 | CICEL | 16pcs | |
Flow value | D07—7C series | BEIJING | 4sets | |
Flow control instrument | D07—7C series | BEIJING | 1set | |
Gas—pressure gauge | international standard | CICEL | 1set | |
Vacuum measurement | ZDF—5227 | SICHUAN | 1set | |
Heating pipe | 9KW | CICEL | 12set | |
valve | Main valve | GDQ—1000 | CICEL | 1set |
Rough valve | GDQ—200 | CICEL | 1 set | |
Front valve | GDQ—200 | CICEL | 1set | |
vacuum system | Diffusion pump | KT—1000 | CICEL | 1set |
Mechanical pump | H—150 | ZHEJIANG | 1set | |
Roots pump | ZJY—1200A | SHANGHAI | 1set | |
Holding pump | 2X—15 | SICHUAN | 1set | |
Electrical appliances | Standard equipment | Omron&Delixi | 1set | |
HMI | 10.4 inch touch screen | Xinjie | 1set | |
Control system | PLC programming | Xinjie | 1set | |
Pumping speed | 5×10-²≤5min | Idle oven | ||
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