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Specifications
pvd vacuum coaters1,good abrasion resistance
2,Easy to operate
3,Nice after-service support
4,environment-protect
1) Technical index.
Ultimate vacuum: (after roasting) vacuum degree limit ≤6×10-4Pa
Work vacuum: The short time exposition atmosphere starts to pump air, vacuum degrees≤6×10-3Pa in 15 minutes.
Both sides of vacuum chamber, installed with 12sets of electric arc target (Φ100mm).
Gas supply system: adopt four MFC supply.
Power supply voltage: AC380V±5%. 50HZ;
Water pressure: 0.2-0.3MP/CM2.
2) Configuration of machine
Part name |
Specification |
Supplier |
Quantity |
|
Chamber size |
Ø1300mm×H1500mm |
CICEL |
1set |
|
Lining board |
1mm stainless steel |
CICEL |
1set |
|
Workpiece steady |
custom-made |
CICEL |
1set |
|
Rotation system |
Frequency regulation |
CICEL |
1set |
|
Bias power supply |
30kw |
GUANGDONG |
1set |
|
arc power supply |
200A |
GUANGDONG |
12sets |
|
Ti target |
Ø100 |
CICEL |
12pcs |
|
Flow value |
D07-7C series |
BEIJING |
4sets |
|
Flow control instrument |
D07-7C series |
BEIJING |
1set |
|
Gas-pressure gauge |
international standard |
CICEL |
1set |
|
Vacuum measurement |
ZDF—5227 |
SICHUAN |
1set |
|
Heating pipe |
9KW |
CICEL |
12sets |
|
valve |
Main valve |
GDQ-800 |
CICEL |
1set |
Rough valve |
GDQ-200 |
CICEL |
1 set |
|
Front valve |
GDQ-150 |
CICEL |
1 set |
|
vacuum system |
Diffusion pump |
KT-800 |
CICEL |
1set |
Mechanical pump |
2X-70 |
SHANGHAI |
2sets |
|
Roots pump |
ZJY-600A |
SHANGHAI |
1set |
|
Holding pump |
2X-15 |
SICHUAN |
1set |
|
Electrical appliances |
Standard equipment |
Omron&Delixi |
1set |
|
HMI |
10.4 inch touch screen |
Xinjie |
1set |
|
Control system |
PLC programming |
Xinjie |
1set |
|
Pumping speed |
5×10-²≤5min |
Idle oven |
|
|
Send Inquiry to This Supplier
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